Problem svgdev2 SNF 2008-07-25 15:43:28: Wouldn't accept wafer

mcherry at snf.stanford.edu mcherry at snf.stanford.edu
Fri Jul 25 15:43:28 PDT 2008


I tried running a 3" substrate in manual mode, but the track wouldn't take the wafer.  The vacuum did not go on either.




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