From rcordova at snf.stanford.edu Thu Jun 5 12:50:48 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 5 Jun 2008 12:50:48 -0700 Subject: Problem svgdev2 SNF 2008-06-05 12:50:47: High spinspeed motor is very loud!!! Message-ID: Please check SS motor on front track. From gsosa at snf.stanford.edu Thu Jun 5 16:46:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Jun 2008 16:46:08 -0700 Subject: Shutdown svgdev2 SNF 2008-06-05 16:46:08: Spindle noise Message-ID: High pitched spindle noise. Replaced the spin motor. Still same problem. Also unable to calibrate spin speed. Probably the encoder sensor for RPM feedback is bad. Will continue to work on it tomorrow. From gsosa at snf.stanford.edu Fri Jun 6 16:17:36 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Jun 2008 16:17:36 -0700 Subject: Comment svgdev2 SNF 2008-06-06 16:17:31: Update 6/6/08 Message-ID: Developer is still down. Replaced all PC boards. Checked wiring and connectors. Checked fuses. System stilll will not calibrate spin speed. Also high pitch whining noise. Will also rebuild spindle assy(bearings and seals) Will continue on Monday. From gsosa at snf.stanford.edu Wed Jun 11 17:19:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jun 2008 17:19:24 -0700 Subject: Shutdown svgdev2 SNF 2008-06-05 16:46:08: Spindle noise Message-ID: Spin motor replaced and spindle housing rebuilt. No more loud spindle noise but motor would not calibrate. Re-verified the CPU and IO boardswere good by testing them in the back track- All OK. Replaced spin motor driver transister, replaced encoder sensor- still same problem. Checked +30 volts for motor- OK at +30 VDC. Checked analog 5 volts- was 4.5 volts. Replaced voltage regulator- now 4.98 volts. Still calibration issues. Checked and cleaned connectors at bottom of card cage- there is some improvement. Spindle calibrates to 7100+ RPMs. This is OK- Max program speed on developer track is 5K. Reprogrammed system and tested with dummies. Fine tuned critical option selects for wafer handling. Track appears to be running OK. Suspect a marginal connection possibly in connectors at bottom of cardcage, or on mother board. Will continue to investigate. Track OK to run. Please verify programs before running and report any problems in coral. From gsosa at snf.stanford.edu Wed Jun 11 17:19:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jun 2008 17:19:34 -0700 Subject: Problem svgdev2 SNF 2008-06-05 12:50:47: High spinspeed motor is very loud!!! Message-ID: Spin motor replaced and spindle housing rebuilt. No more loud spindle noise but motor would not calibrate. Re-verified the CPU and IO boardswere good by testing them in the back track- All OK. Replaced spin motor driver transister, replaced encoder sensor- still same problem. Checked +30 volts for motor- OK at +30 VDC. Checked analog 5 volts- was 4.5 volts. Replaced voltage regulator- now 4.98 volts. Still calibration issues. Checked and cleaned connectors at bottom of card cage- there is some improvement. Spindle calibrates to 7100+ RPMs. This is OK- Max program speed on developer track is 5K. Reprogrammed system and tested with dummies. Fine tuned critical option selects for wafer handling. Track appears to be running OK. Suspect a marginal connection possibly in connectors at bottom of cardcage, or on mother board. Will continue to investigate. Track OK to run. Please verify programs before running and report any problems in coral. From gsosa at snf.stanford.edu Wed Jun 11 17:20:03 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jun 2008 17:20:03 -0700 Subject: Comment svgdev2 SNF 2008-06-11 17:20:02: Update 6/11/08 Message-ID: Spin motor replaced and spindle housing rebuilt. No more loud spindle noise but motor would not calibrate. Re-verified the CPU and IO boardswere good by testing them in the back track- All OK. Replaced spin motor driver transister, replaced encoder sensor- still same problem. Checked +30 volts for motor- OK at +30 VDC. Checked analog 5 volts- was 4.5 volts. Replaced voltage regulator- now 4.98 volts. Still calibration issues. Checked and cleaned connectors at bottom of card cage- there is some improvement. Spindle calibrates to 7100+ RPMs. This is OK- Max program speed on developer track is 5K. Reprogrammed system and tested with dummies. Fine tuned critical option selects for wafer handling. Track appears to be running OK. Suspect a marginal connection possibly in connectors at bottom of cardcage, or on mother board. Will continue to investigate. Track OK to run. Please verify programs before running and report any problems in coral. From jsuarez at snf.stanford.edu Mon Jun 16 11:57:40 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 16 Jun 2008 11:57:40 -0700 Subject: Comment svgdev2 SNF 2008-06-16 11:57:40: solvent on backside Message-ID: wafers have solvent on backside after develop and bake From jsuarez at snf.stanford.edu Mon Jun 16 12:00:45 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 16 Jun 2008 12:00:45 -0700 Subject: Problem svgdev2 SNF 2008-06-16 12:00:45: solvent on backside of wafers Message-ID: wafers have solvent on backside after develop From vilanova at snf.stanford.edu Tue Jun 17 08:17:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 08:17:41 -0700 Subject: Comment svgdev2 SNF 2008-06-16 11:57:40: solvent on backside Message-ID: adjusted backside Nozzle dispenser, cycled wafers Wafers came out nice and dry, ready to use. From vilanova at snf.stanford.edu Tue Jun 17 08:17:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 08:17:49 -0700 Subject: Problem svgdev2 SNF 2008-06-16 12:00:45: solvent on backside of wafers Message-ID: adjusted backside Nozzle dispenser, cycled wafers Wafers came out nice and dry, ready to use. From ahazeghi at snf.stanford.edu Wed Jun 25 01:28:03 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 25 Jun 2008 01:28:03 -0700 Subject: Shutdown svgdev2 SNF 2008-06-25 01:28:02: Problem with DEV track Message-ID: DEV solution old or low destroyed my wafers! From vilanova at snf.stanford.edu Wed Jun 25 07:57:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Jun 2008 07:57:44 -0700 Subject: Shutdown svgdev2 SNF 2008-06-25 01:28:02: Problem with DEV track Message-ID: checked entire system everything looks normal, nobody else has reported this before ( in the past few days) the only thing I can think of id that the user did not run his/her wafers through the yes oven o thought the yes oven cycle was complete took the wafers out , expose and develop and the result was a lift off, the canister was full so when you get something like this is not because the canister was EMPTY! , ok to use From erichall at snf.stanford.edu Wed Jun 25 10:57:44 2008 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Wed, 25 Jun 2008 10:57:44 -0700 Subject: Problem svgdev2 SNF 2008-06-25 10:57:43: Send Indexer Won't Go Down Message-ID: Send indexer would only descend half way. Was able to get it to come back up when I reset the indexer, though. From gsosa at snf.stanford.edu Wed Jun 25 13:53:46 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Jun 2008 13:53:46 -0700 Subject: Problem svgdev2 SNF 2008-06-25 10:57:43: Send Indexer Won't Go Down Message-ID: Teated both send and recieve indexer and track operation. All working OK. From ahazeghi at snf.stanford.edu Wed Jun 25 20:11:40 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 25 Jun 2008 20:11:40 -0700 Subject: Problem svgdev2 SNF 2008-06-25 20:11:39: reciever index does not reset Message-ID: Have to remove wafers manaully From vilanova at snf.stanford.edu Thu Jun 26 07:48:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 Jun 2008 07:48:44 -0700 Subject: Problem svgdev2 SNF 2008-06-25 20:11:39: reciever index does not reset Message-ID: indexer workinf perfctly Fine, Operator error , he probably had it in manual mode trying to run his/her wafers in auto, cycled wafers ok to use.