Shutdown svgdev2 SNF 2008-06-25 01:28:02: Problem with DEV track
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed Jun 25 07:57:44 PDT 2008
checked entire system everything looks normal, nobody else
has reported this before ( in the past few days) the only thing
I can think of id that the user did not run his/her wafers
through the yes oven o thought the yes oven cycle was
complete took the wafers out , expose and develop and the
result was a lift off, the canister was full so when you get
something like this is not because the canister was EMPTY!
, ok to use
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