From chughes at snf.stanford.edu Sun Mar 2 16:16:47 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Sun, 2 Mar 2008 16:16:47 -0800 Subject: Problem svgdev2 SNF 2008-03-02 16:16:46: Developer Section Motor Message-ID: It seems like the motor for the part of the track that physically carries the wafer from the cassette to the developer isn't running. Everything else still seems to work. From vilanova at snf.stanford.edu Mon Mar 3 06:08:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Mar 2008 06:08:14 -0800 Subject: Comment svgdev2 SNF 2008-02-24 21:02:02: Starburst Pattern #2 Message-ID: Developer canister was empty , I refilled it , system back to normal. From vilanova at snf.stanford.edu Mon Mar 3 06:09:51 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Mar 2008 06:09:51 -0800 Subject: Problem svgdev2 SNF 2008-03-02 16:16:46: Developer Section Motor Message-ID: Developer canister was empty , I refilled it , system back to normal. , Remember you have to check the developer canister level Before running your wafers, this step is in the training procedure. From gibby at snf.stanford.edu Mon Mar 3 09:08:18 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Mon, 3 Mar 2008 09:08:18 -0800 Subject: Problem svgdev2 SNF 2008-03-03 09:08:18: Developer Spots on wafer Message-ID: When the wafer is unloading from the developer station, a few drops of developer are left on the wafer, which leads to unexposed regions. From gsosa at snf.stanford.edu Mon Mar 3 10:01:40 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Mar 2008 10:01:40 -0800 Subject: Shutdown svgdev2 SNF 2008-03-03 10:01:39: replumbing the CDA Supply Message-ID: From gsosa at snf.stanford.edu Mon Mar 3 11:14:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Mar 2008 11:14:19 -0800 Subject: Shutdown svgdev2 SNF 2008-03-03 10:01:39: replumbing the CDA Supply Message-ID: Need to gather more parts. will work on at a later time. From lindaw at snf.stanford.edu Mon Mar 3 15:26:03 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 3 Mar 2008 15:26:03 -0800 Subject: Problem svgdev2 SNF 2008-03-03 15:26:02: track over dev module won't close to accept wafers Message-ID: The track at the developer module won't come together to accept the wafers from the load cassette. If I push them together, the track starts turning, but the two sides drift apart, dropping the wafer before it gets to the chuck. From khskoo at snf.stanford.edu Tue Mar 4 19:04:35 2008 From: khskoo at snf.stanford.edu (khskoo at snf.stanford.edu) Date: Tue, 4 Mar 2008 19:04:35 -0800 Subject: Problem svgdev2 SNF 2008-03-04 19:04:32: don't work properly Message-ID: when I hit start, cassette elevator makes weird noise wafer got stuck on the track of the developer or baker From vilanova at snf.stanford.edu Wed Mar 5 14:12:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Mar 2008 14:12:12 -0800 Subject: Problem svgdev2 SNF 2008-03-04 19:04:32: don't work properly Message-ID: Cycled wafers and system is working FIne. From vilanova at snf.stanford.edu Wed Mar 5 14:12:47 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Mar 2008 14:12:47 -0800 Subject: Problem svgdev2 SNF 2008-03-03 15:26:02: track over dev module won't close to accept wafers Message-ID: Lubricated sender Indexer , cycled wafers , ok to use. From shanewang at snf.stanford.edu Tue Mar 11 17:51:56 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Tue, 11 Mar 2008 17:51:56 -0700 Subject: Problem svgdev2 SNF 2008-03-11 17:51:56: transfer problems Message-ID: After cleaning, the tranfer sometimes OK, sometimes paused at spinner. From gsosa at snf.stanford.edu Thu Mar 13 14:43:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Mar 2008 14:43:45 -0700 Subject: Comment svgdev2 SNF 2008-03-13 14:43:44: Reciever not going down Message-ID: Reciever not going down when start is depressed. Checked and adjusted the cassette present switch. Tested with several metal cassettes. All OK. From vilanova at snf.stanford.edu Fri Mar 14 11:04:33 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 Mar 2008 11:04:33 -0700 Subject: Problem svgdev2 SNF 2008-03-11 17:51:56: transfer problems Message-ID: Reciever not going down when start is depressed. Checked and adjusted the cassette present switch. Tested with several metal cassettes. All OK. From vilanova at snf.stanford.edu Fri Mar 14 11:04:48 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 Mar 2008 11:04:48 -0700 Subject: Comment svgdev2 SNF 2008-03-13 14:43:44: Reciever not going down Message-ID: Reciever not going down when start is depressed. Checked and adjusted the cassette present switch. Tested with several metal cassettes. All OK. From kwankyu at snf.stanford.edu Tue Mar 18 21:35:48 2008 From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu) Date: Tue, 18 Mar 2008 21:35:48 -0700 Subject: Problem svgdev2 SNF 2008-03-18 21:35:48: Developer arm dose not work. Message-ID: Arms (Or track) of developer, which carries wafer, dose not work. From vilanova at snf.stanford.edu Wed Mar 19 07:28:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Mar 2008 07:28:24 -0700 Subject: Problem svgdev2 SNF 2008-03-18 21:35:48: Developer arm dose not work. Message-ID: Just Added Developer to the system, cycled wafers, system working FIne. ready to use. From king at snf.stanford.edu Wed Mar 19 23:27:28 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 19 Mar 2008 23:27:28 -0700 Subject: Comment svgdev2 SNF 2008-03-19 23:27:28: No developer spots this time Message-ID: It worked fine. From gsosa at snf.stanford.edu Fri Mar 21 14:47:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Mar 2008 14:47:45 -0700 Subject: Problem svgdev2 SNF 2008-03-03 09:08:18: Developer Spots on wafer Message-ID: Spos fall from carriage slamming closed(too hard). Installed an additional speed controller valve on the air cylinder to improve the control. Adjusted all pneumatics on develop station for smooth operation. Checked for drops-All OK. From jimkruger at snf.stanford.edu Tue Mar 25 10:10:13 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:10:13 -0700 Subject: Problem svgdev2 SNF 2008-03-25 10:10:12: Track no belt motion Message-ID: From vilanova at snf.stanford.edu Tue Mar 25 13:39:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Mar 2008 13:39:20 -0700 Subject: Problem svgdev2 SNF 2008-03-25 10:10:12: Track no belt motion Message-ID: cycled wafers ( 5 each ) and I could not repeat the problem.