Problem svgdev2 SNF 2008-03-03 09:08:18: Developer Spots on wafer

gibby at snf.stanford.edu gibby at snf.stanford.edu
Mon Mar 3 09:08:18 PST 2008


When the wafer is unloading from the developer station, a few drops of developer are left on the wafer, which leads to unexposed regions.




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