Problem svgdev2 SNF 2008-03-03 15:26:02: track over dev module won't close to accept wafers

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Mar 3 15:26:03 PST 2008


The track at the developer module won't come together to accept the wafers from the load cassette.  If I push them together, the track starts turning, but the two sides drift apart, dropping the wafer before it gets to the chuck.




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