Problem svgdev2 SNF 2008-03-03 09:08:18: Developer Spots on wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 21 14:47:45 PDT 2008


Spos fall from carriage slamming closed(too hard). Installed an additional speed controller valve on the air cylinder to improve the control. Adjusted all pneumatics on develop station for smooth operation. Checked for drops-All OK.




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