From grahamab at snf.stanford.edu Thu Aug 13 09:18:55 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 13 Aug 2009 09:18:55 -0700 Subject: Problem svgdev2 SNF 2009-08-13 09:18:54: developer making horrible noise Message-ID: developer is making a god awful noise during the final spin step at 5krpm. wafers came out fine, but I switched over to the other track once I heard it. From gsosa at snf.stanford.edu Thu Aug 13 10:42:42 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:42:42 -0700 Subject: Shutdown svgdev2 SNF 2009-08-13 10:42:41: Spindle noise Message-ID: Working on spindle noise problem. From gsosa at snf.stanford.edu Thu Aug 13 15:19:02 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Aug 2009 15:19:02 -0700 Subject: Problem svgdev2 SNF 2009-08-13 09:18:54: developer making horrible noise Message-ID: Removed spindle and replaced all bearings and vacuum seals. Re-installed spindle. Checked and adjusted wafer centering. Checked chuck vacuum- OK at 24" Hg. Performed spindle calibration. Checked and found a trim plate on carriage assembly that was vibrating against the mounting plate creating a high pitched noise. Repositioned and tightened down the trim plate. Cycled wafers. All OK now, no more noise. From gsosa at snf.stanford.edu Thu Aug 13 15:19:07 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Aug 2009 15:19:07 -0700 Subject: Shutdown svgdev2 SNF 2009-08-13 10:42:41: Spindle noise Message-ID: Removed spindle and replaced all bearings and vacuum seals. Re-installed spindle. Checked and adjusted wafer centering. Checked chuck vacuum- OK at 24" Hg. Performed spindle calibration. Checked and found a trim plate on carriage assembly that was vibrating against the mounting plate creating a high pitched noise. Repositioned and tightened down the trim plate. Cycled wafers. All OK now, no more noise. From ykwon at snf.stanford.edu Wed Aug 19 17:06:49 2009 From: ykwon at snf.stanford.edu (ykwon at snf.stanford.edu) Date: Wed, 19 Aug 2009 17:06:49 -0700 Subject: Problem svgdev2 SNF 2009-08-19 17:06:49: program wiped out? Message-ID: It looks like stored programs are all gone. And also, the machine seems to have trouble baking after development. From xzhuan1 at snf.stanford.edu Wed Aug 19 18:06:44 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 19 Aug 2009 18:06:44 -0700 Subject: Problem svgdev2 SNF 2009-08-19 18:06:43: hot plate problem Message-ID: the rails won't come down for wafer baking From vilanova at snf.stanford.edu Thu Aug 20 08:37:45 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:37:45 -0700 Subject: Shutdown svgdev2 SNF 2009-08-20 08:37:45: Battery Dead , Looking for an Spare one. Message-ID: From gsosa at snf.stanford.edu Thu Aug 20 11:06:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:06:53 -0700 Subject: Problem svgdev2 SNF 2009-08-19 17:06:49: program wiped out? Message-ID: Replaced CPU battery. Reprogrammed track From gsosa at snf.stanford.edu Thu Aug 20 11:07:01 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:07:01 -0700 Subject: Problem svgdev2 SNF 2009-08-19 18:06:43: hot plate problem Message-ID: Replaced CPU battery. Reprogrammed track From gsosa at snf.stanford.edu Thu Aug 20 11:07:06 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:07:06 -0700 Subject: Shutdown svgdev2 SNF 2009-08-20 08:37:45: Battery Dead , Looking for an Spare one. Message-ID: Replaced CPU battery. Reprogrammed track From mtan at snf.stanford.edu Mon Aug 24 12:37:50 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 24 Aug 2009 12:37:50 -0700 Subject: Problem svgdev2 SNF 2009-08-24 12:37:50: DEV program 1 stops before it even starts. Message-ID: From gsosa at snf.stanford.edu Mon Aug 24 14:58:08 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Aug 2009 14:58:08 -0700 Subject: Problem svgdev2 SNF 2009-08-24 12:37:50: DEV program 1 stops before it even starts. Message-ID: There is no develop program #1. Only programs 2 through 8. Checked programs and verified system operation. All OK.