From alsune at snf.stanford.edu Thu Jul 9 21:35:26 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 9 Jul 2009 21:35:26 -0700 Subject: Problem svgdev2 SNF 2009-07-09 21:35:25: Resist Mark on the back after processing Message-ID: Found decent amount of PR marks on the back of the wafer after developing. It seems that the PR got on either the hot plate or the vacuum plate on the developer chamber. Requires cleaning so that it does not cause problem if someone should want to go into the ASML again. From vilanova at snf.stanford.edu Fri Jul 10 11:42:06 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Jul 2009 11:42:06 -0700 Subject: Problem svgdev2 SNF 2009-07-09 21:35:25: Resist Mark on the back after processing Message-ID: cleaned belts and hotplate, tested, Ok to use. From lindaw at snf.stanford.edu Sat Jul 11 11:44:40 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Jul 2009 11:44:40 -0700 Subject: Problem svgdev2 SNF 2009-07-11 11:44:40: 2 of 10 wafers loaded off center Message-ID: to the point of not being able to spin at high rpm. Some liquid still on wafer when it went to hot plate bake. Users beware. From vilanova at snf.stanford.edu Mon Jul 13 08:49:00 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jul 2009 08:49:00 -0700 Subject: Problem svgdev2 SNF 2009-07-11 11:44:40: 2 of 10 wafers loaded off center Message-ID: adjusted centering flags , cycled wafers ( 10 each ) Ready to use. From gsosa at snf.stanford.edu Thu Jul 16 09:11:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 16 Jul 2009 09:11:00 -0700 Subject: Comment svgdev2 SNF 2009-07-16 09:10:59: Back to MF26A Developer Message-ID: MF26A developer is back online 100%. All programs have been changed back for MF26A processing. Please continue to verify process programs against the laminated program sheets. From mmessana at snf.stanford.edu Wed Jul 22 17:59:36 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Wed, 22 Jul 2009 17:59:36 -0700 Subject: Problem svgdev2 SNF 2009-07-22 17:59:35: cassettes missing. Message-ID: the developer and coater cassettes are less in number than before. From vilanova at snf.stanford.edu Thu Jul 23 07:59:37 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jul 2009 07:59:37 -0700 Subject: Problem svgdev2 SNF 2009-07-22 17:59:35: cassettes missing. Message-ID: there is a totasl of 8 metal cassettes the problem is that users leave them everywhere and sometimes they also leave dummy wafers Inside them therefore people think that they're in Use. Please return the Cassette to the developer tracks or Coater as soon as you finished using them . From gth at snf.stanford.edu Sat Jul 25 00:14:28 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 25 Jul 2009 00:14:28 -0700 Subject: Problem svgdev2 SNF 2009-07-25 00:14:27: pgm5 - Dev or water squirt in the last step. Message-ID: From vilanova at snf.stanford.edu Mon Jul 27 08:29:43 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Jul 2009 08:29:43 -0700 Subject: Problem svgdev2 SNF 2009-07-25 00:14:27: pgm5 - Dev or water squirt in the last step. Message-ID: Theres was no Extra drop of Either DI water or Developer On this particular program , I cycled wafers and I couldnt repeat the problem , Ran Program # 3, 5 . Ok to use.