Problem svgdev2 SNF 2009-07-25 00:14:27: pgm5 - Dev or water squirt in the last step.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 27 08:29:43 PDT 2009


Theres was no Extra drop of Either DI water or Developer On this
particular program , I cycled wafers and I couldnt repeat the problem ,
Ran Program # 3, 5 . Ok to use. 




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