From mahnaz at snf.stanford.edu Tue Mar 3 15:45:20 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:45:20 -0800 Subject: Comment svgdev2 SNF 2009-03-03 15:45:20: new recipe Message-ID: I do not know but i am getting so many complains with the development since we lost the control of humidity in the litho area. Any how, I have created program #8 on both tracks with 2X 30 seconds of development for now. Please, if you need to make any adjustment use this program #8 to change the time if needed. I Left a note on the track and will update the procedures tomorrow morning. From erichall at snf.stanford.edu Mon Mar 23 11:00:59 2009 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Mon, 23 Mar 2009 11:00:59 -0700 Subject: Problem svgdev2 SNF 2009-03-23 11:00:58: Send Indexer Unresponsive Message-ID: Came in this morning to find that the Send Indexer wasn't going down. Track can still be used on Manual to develop wafers individually. From gsosa at snf.stanford.edu Mon Mar 23 11:54:27 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Mar 2009 11:54:27 -0700 Subject: Problem svgdev2 SNF 2009-03-23 11:00:58: Send Indexer Unresponsive Message-ID: Checked and replaced elevator drive O-ring. Tested operation. all OK. From haniff at snf.stanford.edu Mon Mar 30 15:47:47 2009 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Mon, 30 Mar 2009 15:47:47 -0700 Subject: Problem svgdev2 SNF 2009-03-30 15:47:46: residue Message-ID: I'm getting a lot of residue on the backs of my wafers. I'm not sure if it is coming from the plate or not. From vilanova at snf.stanford.edu Tue Mar 31 07:43:29 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 07:43:29 -0700 Subject: Problem svgdev2 SNF 2009-03-30 15:47:46: residue Message-ID: cleaned catch cup,hotplate,chuck and belts, adjusted Bottom cleaner Nozzle ,cycled wafers , Back of wafers NIce and clean, Ready to use.