From lilihsu at snf.stanford.edu Tue May 19 18:15:14 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 19 May 2009 18:15:14 -0700 Subject: Comment svgdev2 SNF 2009-05-19 18:15:14: hotplate dirty Message-ID: there is a ring of scum on the hotplate... From gsosa at snf.stanford.edu Wed May 20 08:34:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 May 2009 08:34:46 -0700 Subject: Comment svgdev2 SNF 2009-05-19 18:15:14: hotplate dirty Message-ID: cleaned the hotplate From gsosa at snf.stanford.edu Fri May 22 10:21:59 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 May 2009 10:21:59 -0700 Subject: Problem svgdev2 SNF 2009-05-22 10:21:58: Low developer interlock Message-ID: Low developer fluid interlock. Waiting for developer delivery. Track can be used for PEB only. From gsosa at snf.stanford.edu Fri May 22 14:27:57 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 May 2009 14:27:57 -0700 Subject: Problem svgdev2 SNF 2009-05-22 10:21:58: Low developer interlock Message-ID: refilled developer canister. From ginel at snf.stanford.edu Wed May 27 19:10:30 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Wed, 27 May 2009 19:10:30 -0700 Subject: Problem svgdev2 SNF 2009-05-27 19:10:30: wafer jumped over stops Message-ID: several wafers (3+) jumped over the black stops on the develop station. others stopped appropriately over the spinner head so this is an intermittent issue. From vilanova at snf.stanford.edu Thu May 28 08:29:47 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 May 2009 08:29:47 -0700 Subject: Problem svgdev2 SNF 2009-05-27 19:10:30: wafer jumped over stops Message-ID: cycled several Wafers , ( Programs 3 and 4 ) and I could not repeat the Problem, Ok to use.