Problem svgdev2 SNF 2009-05-27 19:10:30: wafer jumped over stops

ginel at snf.stanford.edu ginel at snf.stanford.edu
Wed May 27 19:10:30 PDT 2009


several wafers (3+) jumped over the black stops on the develop station.  others stopped appropriately over the spinner head so this is an intermittent issue.




More information about the svgdev2-pcs mailing list