Problem svgdev2 SNF 2009-05-27 19:10:30: wafer jumped over stops
ginel at snf.stanford.edu
ginel at snf.stanford.edu
Wed May 27 19:10:30 PDT 2009
several wafers (3+) jumped over the black stops on the develop station. others stopped appropriately over the spinner head so this is an intermittent issue.
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