From rshyam at snf.stanford.edu Sun Nov 8 07:24:12 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 8 Nov 2009 07:24:12 -0800 Subject: Problem svgdev2 SNF 2009-11-08 07:24:12: Residue on bake plate Message-ID: Somebody has left major residue on the bake plate thats leaving a lot of crap on the wafer backside. I tried cleaning the bake plate with acetone but it wont go. From vilanova at snf.stanford.edu Mon Nov 9 08:00:39 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 08:00:39 -0800 Subject: Problem svgdev2 SNF 2009-11-08 07:24:12: Residue on bake plate Message-ID: cleaned.- From barlian at snf.stanford.edu Fri Nov 13 18:28:31 2009 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Fri, 13 Nov 2009 18:28:31 -0800 Subject: Problem svgdev2 SNF 2009-11-13 18:28:31: broken silicon piece Message-ID: Part of my wafer broke during the spinning in the development basis. It's about 1x1 in^2 From rshyam at snf.stanford.edu Mon Nov 16 05:39:07 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 16 Nov 2009 05:39:07 -0800 Subject: Problem svgdev2 SNF 2009-11-16 05:39:06: Leaves residue on backside Message-ID: From vilanova at snf.stanford.edu Mon Nov 16 08:21:46 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:21:46 -0800 Subject: Problem svgdev2 SNF 2009-11-13 18:28:31: broken silicon piece Message-ID: removed broken pieces Adjusted Bottom Nozzle , Cycled wafers , Ok to use. From vilanova at snf.stanford.edu Mon Nov 16 08:21:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:21:51 -0800 Subject: Problem svgdev2 SNF 2009-11-16 05:39:06: Leaves residue on backside Message-ID: removed broken pieces Adjusted Bottom Nozzle , Cycled wafers , Ok to use. From ofidaner at snf.stanford.edu Tue Nov 24 03:49:11 2009 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Tue, 24 Nov 2009 03:49:11 -0800 Subject: Problem svgdev2 SNF 2009-11-24 03:49:11: dirty chuck Message-ID: leaves a lot of developer residue on the backside of wafers From vilanova at snf.stanford.edu Tue Nov 24 07:49:26 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 24 Nov 2009 07:49:26 -0800 Subject: Problem svgdev2 SNF 2009-11-24 03:49:11: dirty chuck Message-ID: cleaned chuck and Also cleaned Hotplates. ( Both tracks )