From yeh at snf.stanford.edu Fri Sep 4 12:53:22 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 4 Sep 2009 12:53:22 -0700 Subject: Comment svgdev2 SNF 2009-09-04 12:53:21: potential problem Message-ID: litho process that used to work is under exposing or developing. process: -svgcoat2, 1um 3612 resist -1.5sec exposure at KarlSuss2, soft contact mode - svgdev prog. 3/bake 1. this process has worked many times in the past but both my wafers today had resist in the edge dies where it should be exposed/developed. suspect either the resist coater is giving thicker films and/or KS2 UV lamp has reduced intensity than normal. From vilanova at snf.stanford.edu Wed Sep 9 09:58:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:58:54 -0700 Subject: Shutdown svgdev2 SNF 2009-09-09 09:58:54: Monthly Preventive maintenance in progress.... Message-ID: From vilanova at snf.stanford.edu Wed Sep 9 10:44:50 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Sep 2009 10:44:50 -0700 Subject: Shutdown svgdev2 SNF 2009-09-09 09:58:54: Monthly Preventive maintenance in progress.... Message-ID: MOnthly POM Completed. From mmessana at snf.stanford.edu Fri Sep 11 11:00:37 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Fri, 11 Sep 2009 11:00:37 -0700 Subject: Problem svgdev2 SNF 2009-09-11 11:00:37: Input cassette not sensing wafer Message-ID: It lifts cassette up and the track won't take the wafer From gsosa at snf.stanford.edu Fri Sep 11 14:03:26 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Sep 2009 14:03:26 -0700 Subject: Problem svgdev2 SNF 2009-09-11 11:00:37: Input cassette not sensing wafer Message-ID: Cycled 30 wafers through the tool with several different cassettes. Wafet transfer looks good.