Shutdown svgdev2 SNF 2009-09-09 09:58:54: Monthly Preventive maintenance in progress....
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed Sep 9 10:44:50 PDT 2009
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Shutdown svgdev2 SNF 2009-09-09 09:58:54: Monthly Preventive maintenance in progress....
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Problem svgdev2 SNF 2009-09-11 11:00:37: Input cassette not sensing wafer
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MOnthly POM Completed.
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Shutdown svgdev2 SNF 2009-09-09 09:58:54: Monthly Preventive maintenance in progress....
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Problem svgdev2 SNF 2009-09-11 11:00:37: Input cassette not sensing wafer
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