From rik at snf.stanford.edu  Thu Apr  1 18:22:09 2010
From: rik at snf.stanford.edu (rik at snf.stanford.edu)
Date: Thu, 1 Apr 2010 18:22:09 -0700
Subject: Problem svgdev2 SNF 2010-04-01 18:22:08: Slick patch near svgdev
Message-ID: <mailman.801.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

there is a slippery patch right next to svgdev. Be careful around it, especially with wafers. might end up falling ... or worse dropping your wafers!



From vilanova at snf.stanford.edu  Fri Apr  2 08:31:48 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 2 Apr 2010 08:31:48 -0700
Subject: Comment svgdev2 SNF 2010-03-26 16:53:22: Wafer not landing properly on hot plate
Message-ID: <mailman.802.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

cleaned excess of photoresist from hotplates ( track 1 and 2 )
and tested, Wafers landing right on the hotplate center, 
Ok to use. 



From vilanova at snf.stanford.edu  Fri Apr  2 10:57:15 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 2 Apr 2010 10:57:15 -0700
Subject: Problem svgdev2 SNF 2010-04-01 18:22:08: Slick patch near svgdev
Message-ID: <mailman.803.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

No more leaks, we've been monitoring it  since early morning 
and there has been no more leaks. 



From karthikv at snf.stanford.edu  Fri Apr 16 17:43:51 2010
From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu)
Date: Fri, 16 Apr 2010 17:43:51 -0700
Subject: Problem svgdev2 SNF 2010-04-16 17:43:50: hot plate dirty
Message-ID: <mailman.804.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

Hot plate looks dirty. Tried to clean with acetone but didn't get very far.



From vilanova at snf.stanford.edu  Mon Apr 19 07:46:51 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 19 Apr 2010 07:46:51 -0700
Subject: Problem svgdev2 SNF 2010-04-16 17:43:50: hot plate dirty
Message-ID: <mailman.805.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

cleaned. 



From uli at snf.stanford.edu  Thu Apr 22 11:58:10 2010
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 22 Apr 2010 11:58:10 -0700
Subject: Problem svgdev2 SNF 2010-04-22 11:58:10: developer residue on wafer backside
Message-ID: <mailman.806.1357938783.25913.svgdev2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Thu Apr 22 15:45:24 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 22 Apr 2010 15:45:24 -0700
Subject: Problem svgdev2 SNF 2010-04-22 11:58:10: developer residue on wafer backside
Message-ID: <mailman.807.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

checked and adjusted BSR nozzle. Cleaned the chuck. Tested with dummy wafers