From zzp at snf.stanford.edu Sun Aug 1 16:23:21 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 1 Aug 2010 16:23:21 -0700 Subject: Shutdown svgdev2 SNF 2010-08-01 16:23:20: wafer broken inside Message-ID: From vilanova at snf.stanford.edu Mon Aug 2 08:22:34 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Aug 2010 08:22:34 -0700 Subject: Shutdown svgdev2 SNF 2010-08-01 16:23:20: wafer broken inside Message-ID: removed broken wafer pieces, cleaned catch cup belts hotplate, Refilled Developer Canister , Calibrated Spindle motor, Cycled wafers , Ok to use. From xzhuan1 at snf.stanford.edu Thu Aug 12 11:15:08 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:15:08 -0700 Subject: Problem svgdev2 SNF 2010-08-12 11:15:07: chuck won't move Message-ID: happened on a couple of my wafers. the wafer stopped on the chuck and wouldn't move to the dispensing position. From vilanova at snf.stanford.edu Thu Aug 12 11:48:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:48:01 -0700 Subject: Problem svgdev2 SNF 2010-08-12 11:15:07: chuck won't move Message-ID: found the system under manual mode, reseted it track and cycled wafers ( 6 each ) developer track working normal, Ok to use. From dton at snf.stanford.edu Thu Aug 12 19:50:08 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Thu, 12 Aug 2010 19:50:08 -0700 Subject: Problem svgdev2 SNF 2010-08-12 19:50:08: Wafer broken Message-ID: Wafer broken during run. From vilanova at snf.stanford.edu Fri Aug 13 08:42:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Aug 2010 08:42:47 -0700 Subject: Problem svgdev2 SNF 2010-08-12 19:50:08: Wafer broken Message-ID: removed broken wafer , cleaned Station ( Bowl Hotplate and belts) Refilled Both Developer Canisters Cycled wafers, Ok to use. From ahazeghi at snf.stanford.edu Fri Aug 13 21:17:14 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Fri, 13 Aug 2010 21:17:14 -0700 Subject: Shutdown svgdev2 SNF 2010-08-13 21:17:13: track not operational Message-ID: track does not work as a result of being operated in manual mode, power cycle did not help. From mtang at snf.stanford.edu Sat Aug 14 10:13:59 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 14 Aug 2010 10:13:59 -0700 Subject: Shutdown svgdev2 SNF 2010-08-13 21:17:13: track not operational Message-ID: Superuser Jason will try a software reset. From lindaw at snf.stanford.edu Wed Aug 18 14:35:53 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 18 Aug 2010 14:35:53 -0700 Subject: Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck Message-ID: The blocks that come up to stop the wafer centered on the chuck are not coming up all the way ~50% of the time. From gsosa at snf.stanford.edu Wed Aug 18 15:59:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Aug 2010 15:59:58 -0700 Subject: Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck Message-ID: Adjusted spindle delay time to allow for proper centering of wafers. From mahnaz at snf.stanford.edu Thu Aug 19 10:16:08 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Aug 2010 10:16:08 -0700 Subject: Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer Message-ID: I was at Laurell and heard it . From gsosa at snf.stanford.edu Thu Aug 19 11:06:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Aug 2010 11:06:12 -0700 Subject: Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer Message-ID: Dis-assembled and cleaned developer bowl. Tested track wafer transfer in Auto-OK. Checked chuck vacuum-OK (22.6"). Checked centering-OK. From jwpchen at snf.stanford.edu Sat Aug 21 08:18:27 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 21 Aug 2010 08:18:27 -0700 Subject: Problem svgdev2 SNF 2010-08-21 08:18:26: HPO vacuum error Message-ID: on most wafers there is HPO vacuum break alarm, need to clear and start to resume pipeline... these are double-polished wafers so it's hard to blame the wafers From jwpchen at snf.stanford.edu Sun Aug 22 06:20:39 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 22 Aug 2010 06:20:39 -0700 Subject: Comment svgdev2 SNF 2010-08-22 06:20:38: could not repeat HPO vacuum error Message-ID: unlike yesterday didn't see any HPO vacuum break errors, maybe another user fixed it or vacuum sensor no longer glitchy From vilanova at snf.stanford.edu Mon Aug 23 08:06:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2010 08:06:42 -0700 Subject: Problem svgdev2 SNF 2010-08-21 08:18:26: HPO vacuum error Message-ID: VACUUM ERROR ....... THERE WAS A BIG SPOT ON THE HOTPLATE IT HAD THE DEVELOPER CHUCK MARK ON IT, CLEANED UP CHUCK AND CYCLED WAFERS , NO MORE "VACUUM ERROR" PROBLEM , OK TO USE. From vilanova at snf.stanford.edu Mon Aug 23 08:06:48 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2010 08:06:48 -0700 Subject: Comment svgdev2 SNF 2010-08-22 06:20:38: could not repeat HPO vacuum error Message-ID: VACUUM ERROR ....... THERE WAS A BIG SPOT ON THE HOTPLATE IT HAD THE DEVELOPER CHUCK MARK ON IT, CLEANED UP CHUCK AND CYCLED WAFERS , NO MORE "VACUUM ERROR" PROBLEM , OK TO USE.