Problem svgdev2 SNF 2010-08-12 11:15:07: chuck won't move

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 12 11:48:01 PDT 2010


found the system under manual mode, reseted it track
and cycled wafers ( 6 each ) developer track working normal,
Ok to use. 




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