Shutdown svgdev2 SNF 2010-08-13 21:17:13: track not operational
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Sat Aug 14 10:13:59 PDT 2010
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Shutdown svgdev2 SNF 2010-08-13 21:17:13: track not operational
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Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck
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Superuser Jason will try a software reset.
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Shutdown svgdev2 SNF 2010-08-13 21:17:13: track not operational
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Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck
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