Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 18 15:59:58 PDT 2010


Adjusted spindle delay time to allow for proper centering of wafers. 




More information about the svgdev2-pcs mailing list