Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Thu Aug 19 10:16:08 PDT 2010
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Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck
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Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer
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I was at Laurell and heard it .
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Problem svgdev2 SNF 2010-08-18 14:35:53: wafers overshooting the spin chuck
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Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer
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