Shutdown svgdev2 SNF 2010-08-19 10:16:07: broke the wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Aug 19 11:06:12 PDT 2010


Dis-assembled and cleaned developer bowl. Tested track wafer transfer in Auto-OK. Checked chuck vacuum-OK (22.6"). Checked centering-OK.




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