Problem svgdev2 SNF 2010-08-21 08:18:26: HPO vacuum error

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Sat Aug 21 08:18:27 PDT 2010


on most wafers there is HPO vacuum break alarm, need to clear and start to resume pipeline... these are double-polished wafers so it's hard to blame the wafers




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