Problem svgdev2 SNF 2010-08-21 08:18:26: HPO vacuum error

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 23 08:06:42 PDT 2010

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VACUUM ERROR ....... THERE WAS A BIG SPOT ON THE HOTPLATE
IT HAD THE DEVELOPER CHUCK MARK ON IT, CLEANED UP 
CHUCK AND CYCLED WAFERS , NO  MORE "VACUUM ERROR"
PROBLEM , OK TO USE.

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