From lindaw at snf.stanford.edu  Thu Jul  1 12:41:17 2010
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 1 Jul 2010 12:41:17 -0700
Subject: Problem svgdev2 SNF 2010-07-01 12:41:16: wafer loads on chuck, nothing happens
Message-ID: <mailman.810.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

wafer stuck on chuck.



From vilanova at snf.stanford.edu  Thu Jul  1 13:25:46 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 1 Jul 2010 13:25:46 -0700
Subject: Problem svgdev2 SNF 2010-07-01 12:41:16: wafer loads on chuck, nothing happens
Message-ID: <mailman.811.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

increases air flow to air sensor , cycled wafers good to use.
Also replaced broken monitor on un microsystems #14 next to
developer track. 



From faridz at snf.stanford.edu  Fri Jul 16 11:22:37 2010
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Fri, 16 Jul 2010 11:22:37 -0700
Subject: Comment svgdev2 SNF 2010-07-16 11:22:37: wafer broken inside the chamber 
Message-ID: <mailman.812.1357938783.25913.svgdev2-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Fri Jul 16 13:32:29 2010
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 16 Jul 2010 13:32:29 -0700
Subject: Problem svgdev2 SNF 2010-07-16 13:32:28: broken wafer in bowl from 
Message-ID: <mailman.813.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

previous, previous user



From vilanova at snf.stanford.edu  Fri Jul 16 14:20:07 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 16 Jul 2010 14:20:07 -0700
Subject: Problem svgdev2 SNF 2010-07-16 13:32:28: broken wafer in bowl from 
Message-ID: <mailman.814.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

removed broken wafer cleaned catch cup bowl, cycled wafers 
Ok to use. 



From vilanova at snf.stanford.edu  Fri Jul 16 14:20:13 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 16 Jul 2010 14:20:13 -0700
Subject: Comment svgdev2 SNF 2010-07-16 11:22:37: wafer broken inside the chamber 
Message-ID: <mailman.815.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

removed broken wafer cleaned catch cup bowl, cycled wafers 
Ok to use



From jwpchen at snf.stanford.edu  Sun Jul 25 12:19:13 2010
From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu)
Date: Sun, 25 Jul 2010 12:19:13 -0700
Subject: Problem svgdev2 SNF 2010-07-25 12:19:13: spinner centering problem
Message-ID: <mailman.816.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

roughly half the wafers processed are centered okay, but the rest can be grossly mis-centered due to wafer overshooting the alignment stops, spinner spindle also slow to raise after processing



From gsosa at snf.stanford.edu  Mon Jul 26 08:58:50 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 26 Jul 2010 08:58:50 -0700
Subject: Problem svgdev2 SNF 2010-07-25 12:19:13: spinner centering problem
Message-ID: <mailman.817.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

Ran many wafers with standard program. Unable to reproduce the problem. Checked wafer centering device height- Looks OK.