Problem svgdev2 SNF 2010-07-01 12:41:16: wafer loads on chuck, nothing happens

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 1 13:25:46 PDT 2010


increases air flow to air sensor , cycled wafers good to use.
Also replaced broken monitor on un microsystems #14 next to
developer track. 




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