Problem svgdev2 SNF 2010-07-25 12:19:13: spinner centering problem

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Sun Jul 25 12:19:13 PDT 2010


roughly half the wafers processed are centered okay, but the rest can be grossly mis-centered due to wafer overshooting the alignment stops, spinner spindle also slow to raise after processing




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