From gth at snf.stanford.edu  Sun Jun 13 02:21:32 2010
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Sun, 13 Jun 2010 02:21:32 -0700
Subject: Problem svgdev2 SNF 2010-06-13 02:21:31: pgm 3 + bake 1 leaves wet stains on the back of wafr
Message-ID: <mailman.808.1357938783.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Jun 14 08:00:20 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 14 Jun 2010 08:00:20 -0700
Subject: Problem svgdev2 SNF 2010-06-13 02:21:31: pgm 3 + bake 1 leaves wet stains on the back of wafr
Message-ID: <mailman.809.1357938783.25913.svgdev2-pcs@snf.stanford.edu>

Adjusted back side rinse nozzle ,cycled wafers (program # 3) 
Backside of wafers nice and clean, ok to use.