Problem svgdev2 SNF 2010-03-03 11:39:29: back side of the wafer comming out wet

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 3 14:45:12 PST 2010


adjusted bottom EBR Nozzle, cycled many wafers,  wafers backside 
nice and clean , ok to use. 




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