Problem svgdev2 SNF 2010-03-15 12:19:47: backside of the wafers are wet?????

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 15 14:41:57 PDT 2010


Checked and adjusted angle of backside rinse nozzle. Also, program 3 had a few errors in the program including the 2 puddle steps. Should have been 20 seconds instead of 2 seconds. Corrected the program. Tested system several times with test wafers. Backsides of wafers now coming out dry. 




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