From lindaw at snf.stanford.edu Tue Sep 7 17:41:04 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 7 Sep 2010 17:41:04 -0700 Subject: Problem svgdev2 SNF 2010-09-07 17:41:03: hot plate wire guides not landing in slots Message-ID: Every couple of wafers, the wires holding the wafer would just miss the slots, and the alarm would sound due to lack of vacuum because the wafers was not in contact with the hot plate. Visually, when the hot plate is empty it looks like the wires are right above the slots. Don't know what is up with that. From vilanova at snf.stanford.edu Thu Sep 9 10:54:40 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Sep 2010 10:54:40 -0700 Subject: Problem svgdev2 SNF 2010-09-07 17:41:03: hot plate wire guides not landing in slots Message-ID: cleaned resist residues from Hotplate and cycled wafers, System ready to use. From xzhuan1 at snf.stanford.edu Thu Sep 16 16:26:23 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 16 Sep 2010 16:26:23 -0700 Subject: Problem svgdev2 SNF 2010-09-16 16:26:23: hot plate rail misaligned Message-ID: wafer won't sit on the hot plate because of the rail misalignment From jwpchen at snf.stanford.edu Sat Sep 18 12:47:11 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 18 Sep 2010 12:47:11 -0700 Subject: Comment svgdev2 SNF 2010-09-18 12:47:10: dev prop arm missing screw Message-ID: found the prop-up arm for dev station not attached to frame, missing screw, but the parts found in catch tray not same as the parts on svgdev, okay to use svgdev2 as long as you won't mess with the frame From vilanova at snf.stanford.edu Mon Sep 20 07:51:02 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2010 07:51:02 -0700 Subject: Problem svgdev2 SNF 2010-09-16 16:26:23: hot plate rail misaligned Message-ID: Found hotplate full of chemical Residues, wafers were getting stuck on the hotplate and rails were trying to come back up moving the wafer out of position, Cleaned Hotplate and cycled wafers, ok to use, ALso FOund Catch cup Arm Screw Lifter On the table next to SVGDev2 Installed and tested, Ok to use now. From vilanova at snf.stanford.edu Mon Sep 20 07:51:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2010 07:51:13 -0700 Subject: Comment svgdev2 SNF 2010-09-18 12:47:10: dev prop arm missing screw Message-ID: Found hotplate full of chemical Residues, wafers were getting stuck on the hotplate and rails were trying to come back up moving the wafer out of position, Cleaned Hotplate and cycled wafers, ok to use, ALso FOund Catch cup Arm Screw Lifter On the table next to SVGDev2 Installed and tested, Ok to use now. From gsosa at snf.stanford.edu Mon Sep 20 09:53:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 09:53:32 -0700 Subject: Comment svgdev2 SNF 2010-09-20 09:53:32: Lifter problem at bake Message-ID: Wafer lifters not going all the way down so wafer does not sit on hotplate surface( vacuum error). Checked lifter drive leadscrew which was very stiff. Cleaned and lightly lubed the leadscrew assembly. Now, lifter moves smoothly. Cycled 50+ wafers through hotplate. All looks OK. From gsosa at snf.stanford.edu Mon Sep 20 09:54:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 09:54:02 -0700 Subject: Comment svgdev2 SNF 2010-09-20 09:53:32: Lifter problem at bake Message-ID: Wafer lifters not going all the way down so wafer does not sit on hotplate surface( vacuum error). Checked lifter drive leadscrew which was very stiff. Cleaned and lightly lubed the leadscrew assembly. Now, lifter moves smoothly. Cycled 50+ wafers through hotplate. All looks OK. From gsosa at snf.stanford.edu Wed Sep 29 15:18:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:18:44 -0700 Subject: Comment svgdev2 SNF 2010-09-29 15:18:44: Hotplate Temperature Verification 09/29 Message-ID: Verified hotplate temperatures on both developer tracks with the following results: Target temperature set at 110 Deg. C. Measured Temperature- Developer #2(Front): 110.2 Deg C. Uniformity: 0.23% Developer #1(Back): 109.9 Deg C. Uniformity: 0.23% Used a thermocouple wafer to measure the target temperature at the center of the hotplate. Used a surface contact thermometer to measure the hotplate uniformity . Both hotplates are within <.5 degrees of setpoint and within .3 degrees of each-other.