From wslee at snf.stanford.edu Wed Aug 10 07:23:51 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 10 Aug 2011 07:23:51 -0700 Subject: Problem svgdev2 SNF 2011-08-10 07:23:50: oven station skipped Message-ID: I ran develop program 4 and oven program 2. When the wafer went to the oven, the white tracks opened and closed without baking the wafer. I earlier ran oven program 3 for my PEB without any problems. From gsosa at snf.stanford.edu Wed Aug 10 08:19:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Aug 2011 08:19:29 -0700 Subject: Problem svgdev2 SNF 2011-08-10 07:23:50: oven station skipped Message-ID: Checked oven program 2. 1st operational step was "End" instead of "Contact" bake. Corrected program. Track tested OK. From pnataraj at snf.stanford.edu Wed Aug 24 16:44:50 2011 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Wed, 24 Aug 2011 16:44:50 -0700 Subject: Problem svgdev2 SNF 2011-08-24 16:44:50: prog 3 is bad Message-ID: From vilanova at snf.stanford.edu Thu Aug 25 08:21:39 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:21:39 -0700 Subject: Problem svgdev2 SNF 2011-08-24 16:44:50: prog 3 is bad Message-ID: Checked Program 3 steps and event , all of them were normal , Cycled wafers , system working Fine, CLeaned Hotplate, Ok to use.