Problem svgdev2 SNF 2011-12-10 12:01:34: not working properly

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Dec 10 12:01:35 PST 2011


1. recipe stops in the middle of the recipe.
2. wafer was automatically transferred to the receiver cassette while the developer is still on the wafer.
3. the receiver part moves up and down extremely slowly.
I don't recommend you not to use this machine now. For just in case, I do not shut this down.




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