Problem svgdev2 SNF 2011-12-10 12:01:34: not working properly

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Dec 12 07:26:10 PST 2011


1)Found a lot of chemical all over the belts chuck and hotplate , it looks
like if someone was running wafers with Tape or Using a different 
chemical ( Liquid FOund was Black ) cleaned up the system  and ran 
several wafers Through .
2) Indexers send and received making noise ,  Most of the
metal cassette Dont sit properly On the Indexers therefore it makes 
noise,because the Indexers does not touch or trigger the sensor 
properly




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