From gsosa at snf.stanford.edu  Tue Jan 11 08:38:14 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 11 Jan 2011 08:38:14 -0800
Subject: Shutdown svgdev2 SNF 2011-01-10 21:16:31: wafer handling problem
Message-ID: <mailman.846.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

The track was powered down when I arrived. Powered up the track and stabilized bake plate temperature. Cycled 15 wafers using standard process. Track running normally.



From paik at snf.stanford.edu  Thu Jan 27 16:55:17 2011
From: paik at snf.stanford.edu (paik at snf.stanford.edu)
Date: Thu, 27 Jan 2011 16:55:17 -0800
Subject: Problem svgdev2 SNF 2011-01-27 16:55:15: residue seen on oven
Message-ID: <mailman.847.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

there seems to be some residue on the oven that got transfered to the wafer during development.



From gsosa at snf.stanford.edu  Fri Jan 28 08:29:26 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 28 Jan 2011 08:29:26 -0800
Subject: Problem svgdev2 SNF 2011-01-27 16:55:15: residue seen on oven
Message-ID: <mailman.848.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

Could not clean resudue off with chemicals. Cleaned off the residue with scotch-brite. Wiped down with acetone/IPA. Tested track operation with standard program All OK.