Shutdown svgdev2 SNF 2011-01-10 21:16:31: wafer handling problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jan 11 08:38:14 PST 2011

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The track was powered down when I arrived. Powered up the track and stabilized bake plate temperature. Cycled 15 wafers using standard process. Track running normally.

Next message: Problem svgdev2 SNF 2011-01-27 16:55:15: residue seen on oven
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