Comment svgdev2 SNF 2011-07-08 09:23:03: Cleaned 7/8

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 8 09:23:04 PDT 2011


Checked developer for backside wetting. Slight wetting and spotting. Adjusted rinse nozzle position. Cleaned chuck and belts. Backside OK now. Operational test OK.




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