From vilanova at snf.stanford.edu  Fri Jun 10 09:49:23 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 10 Jun 2011 09:49:23 -0700
Subject: Comment svgdev2 SNF 2011-06-10 09:49:22: Cleaned !!
Message-ID: <mailman.877.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

Cleaned Excess Of Resist from hotplate,. tested ,Ok to use



From ntayebi at snf.stanford.edu  Tue Jun 21 17:40:26 2011
From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu)
Date: Tue, 21 Jun 2011 17:40:26 -0700
Subject: Shutdown svgdev2 SNF 2011-06-21 17:40:26: stage not moving
Message-ID: <mailman.878.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

The stage is not moving and it keeps beeping without pressing start. My wafer got stuck. I turned off the system to be able to get it off



From vilanova at snf.stanford.edu  Wed Jun 22 07:48:30 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 22 Jun 2011 07:48:30 -0700
Subject: Shutdown svgdev2 SNF 2011-06-21 17:40:26: stage not moving
Message-ID: <mailman.879.1357938784.25913.svgdev2-pcs@snf.stanford.edu>

Enabled the system and checked Programs, Cycled wafers , System working Normal , All my wafers went through FIne, It could been that
system wasnt enable or the metal cassette wasnt  In the right position.