From gsosa at snf.stanford.edu Tue Mar 1 15:21:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 15:21:14 -0800 Subject: Shutdown svgdev2 SNF 2011-03-01 15:21:13: Exhaust problem 3/1 Message-ID: From gsosa at snf.stanford.edu Tue Mar 1 17:52:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 17:52:48 -0800 Subject: Shutdown svgdev2 SNF 2011-03-01 15:21:13: Exhaust problem 3/1 Message-ID: Re-adjusted exhaust to compensate for reduced exhaust flow. Tested track operation-All OK From fc3 at snf.stanford.edu Mon Mar 21 00:50:10 2011 From: fc3 at snf.stanford.edu (fc3 at snf.stanford.edu) Date: Mon, 21 Mar 2011 00:50:10 -0700 Subject: Problem svgdev2 SNF 2011-03-21 00:50:09: wafer stuck on vacuum holder Message-ID: test wafers ran fine, but when i use my actual wafer, the process stalls and i can't remove my wafer due to the vacuum contact. From fc3 at snf.stanford.edu Mon Mar 21 00:52:37 2011 From: fc3 at snf.stanford.edu (fc3 at snf.stanford.edu) Date: Mon, 21 Mar 2011 00:52:37 -0700 Subject: Shutdown svgdev2 SNF 2011-03-21 00:52:36: wafer stuck on vacuum mount Message-ID: dummy wafers ran fine, but when i ran my actual wafer, the developer stalled. i can't remove my wafer due to the vacuum mount. please return wafer to me if possible. From fc3 at snf.stanford.edu Mon Mar 21 01:52:22 2011 From: fc3 at snf.stanford.edu (fc3 at snf.stanford.edu) Date: Mon, 21 Mar 2011 01:52:22 -0700 Subject: Comment svgdev2 SNF 2011-03-21 01:52:22: stuck wafer Message-ID: was able to remove stuck wafer from the vacuum holder with slight force From vilanova at snf.stanford.edu Mon Mar 21 07:53:25 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Mar 2011 07:53:25 -0700 Subject: Shutdown svgdev2 SNF 2011-03-21 00:52:36: wafer stuck on vacuum mount Message-ID: Checked and Cycled dummy wafers ( 6 each ) Program # 3 System Works Fine, the canister are full, We'll keep an Eye on it to see if the problem Come back. From vilanova at snf.stanford.edu Mon Mar 21 07:53:30 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Mar 2011 07:53:30 -0700 Subject: Comment svgdev2 SNF 2011-03-21 01:52:22: stuck wafer Message-ID: Checked and Cycled dummy wafers ( 6 each ) Program # 3 System Works Fine, the canister are full, We'll keep an Eye on it to see if the problem Come back. From vilanova at snf.stanford.edu Mon Mar 21 07:53:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Mar 2011 07:53:38 -0700 Subject: Problem svgdev2 SNF 2011-03-21 00:50:09: wafer stuck on vacuum holder Message-ID: Checked and Cycled dummy wafers ( 6 each ) Program # 3 System Works Fine, the canister are full, We'll keep an Eye on it to see if the problem Come back. From yoneoka at snf.stanford.edu Mon Mar 28 10:14:15 2011 From: yoneoka at snf.stanford.edu (yoneoka at snf.stanford.edu) Date: Mon, 28 Mar 2011 10:14:15 -0700 Subject: Comment svgdev2 SNF 2011-03-28 10:14:14: Wafer chuck and heater are dirty Message-ID: From vilanova at snf.stanford.edu Tue Mar 29 10:23:45 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Mar 2011 10:23:45 -0700 Subject: Comment svgdev2 SNF 2011-03-28 10:14:14: Wafer chuck and heater are dirty Message-ID: cleaned chuck and resist from hotplate, tested ok, good to use.