Problem svgdev2 SNF 2011-03-21 00:50:09: wafer stuck on vacuum holder

fc3 at snf.stanford.edu fc3 at snf.stanford.edu
Mon Mar 21 00:50:10 PDT 2011


test wafers ran fine, but when i use my actual wafer, the process stalls and i can't remove my wafer due to the vacuum contact.




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