Shutdown svgdev2 SNF 2011-03-21 00:52:36: wafer stuck on vacuum mount

fc3 at snf.stanford.edu fc3 at snf.stanford.edu
Mon Mar 21 00:52:37 PDT 2011


dummy wafers ran fine, but when i ran my actual wafer, the developer stalled. i can't remove my wafer due to the vacuum mount. please return wafer to me if possible.




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