Problem svgdev2 SNF 2011-05-02 12:04:54: serious developer residue

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 2 14:28:54 PDT 2011


backside rinse nozzle was out of position ,Adjusted Nozzle and
Cycled wafers backside comes out clean , I also cleaned  the hotplate. 




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