Shutdown svgdev2 SNF 2011-05-05 22:03:17: Break wafer

ylyang at snf.stanford.edu ylyang at snf.stanford.edu
Thu May 5 22:03:18 PDT 2011


The wafer keeps spin after develop and does not stops. The sounds is bad and I can not stop it.. Accidentaly touch the power and the wafer loss vacum and break.




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