Shutdown svgdev2 SNF 2011-05-05 22:03:17: Break wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 6 15:57:22 PDT 2011


Unable to control spindler speed. Also spindle very rough. Replaced spindle guide plate w/ new motor. Rebuilt and installed spindle assembly.  Replaced 5a fuse for motor control. Replaced high speed drive transistor(MJ11033) to regain spindle motor control. Performed spindle calibration- OK to 99KRPM. Checked and adjusted spindle position flag plate for proper wafer transfer. Cycled wafers- All OK. 




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