From vilanova at snf.stanford.edu Tue Oct 4 07:58:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Oct 2011 07:58:55 -0700 Subject: Comment svgdev2 SNF 2011-10-04 07:58:54: Found a lot of THick Resist Residues On Hotplate Message-ID: I Found The hotplate Full of Thick Resist Residues, Cleaned it up and tested, Ok to use. From mahnaz at snf.stanford.edu Fri Oct 14 10:11:55 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 14 Oct 2011 10:11:55 -0700 Subject: Problem svgdev2 SNF 2011-10-14 10:11:55: wfs coming out slightly wet Message-ID: in the bck. From vilanova at snf.stanford.edu Fri Oct 14 11:23:52 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:23:52 -0700 Subject: Problem svgdev2 SNF 2011-10-14 10:11:55: wfs coming out slightly wet Message-ID: Adjusted the Bottom NOzzle and tested, with dummy wafers, all came out nice and clean , ok to use From ehe at snf.stanford.edu Mon Oct 17 13:24:27 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 17 Oct 2011 13:24:27 -0700 Subject: Problem svgdev2 SNF 2011-10-17 13:24:26: stopping after single wafers Message-ID: Track 2 was set to auto, but stopped (receivers reset) after a single wafer twice in a row. From vilanova at snf.stanford.edu Mon Oct 17 14:06:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Oct 2011 14:06:57 -0700 Subject: Problem svgdev2 SNF 2011-10-17 13:24:26: stopping after single wafers Message-ID: Cycled all Developer dummy wafers ( Twice ) Could not repat the user Problem, All Operations Ok . From sclaussen at snf.stanford.edu Mon Oct 24 15:46:02 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 24 Oct 2011 15:46:02 -0700 Subject: Problem svgdev2 SNF 2011-10-24 15:46:02: Wafer is stuck on hotplate Message-ID: Found the track with a dummy wafer on the hotplate. Can't get it to continue. From vilanova at snf.stanford.edu Tue Oct 25 07:55:24 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Oct 2011 07:55:24 -0700 Subject: Problem svgdev2 SNF 2011-10-24 15:46:02: Wafer is stuck on hotplate Message-ID: Cleaned and Removed Excess OF Resist From Hotplate, Tested All Operations are Ok, ready to use. From lindaw at snf.stanford.edu Thu Oct 27 13:49:03 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 27 Oct 2011 13:49:03 -0700 Subject: Problem svgdev2 SNF 2011-10-27 13:49:02: wafer loads on chuck, then nothing happens Message-ID: after developing 6 wafers without a problem, the 7th wafer loads on chuck, the chuck goes down but the developer dispense does not happen. the cannisters all feel quite full of developer. Tried wiping the chuck with a damp wipe, to see if there might have been something obstructing the vacuum, test wafer ran ok, then the next wafer ran ok, but the one after that got stuck again. From qran at snf.stanford.edu Thu Oct 27 14:33:54 2011 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Thu, 27 Oct 2011 14:33:54 -0700 Subject: Problem svgdev2 SNF 2011-10-27 14:33:54: a test wafer is in the chuck, doesn't move Message-ID: From qran at snf.stanford.edu Thu Oct 27 14:44:21 2011 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Thu, 27 Oct 2011 14:44:21 -0700 Subject: Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove Message-ID: From gsosa at snf.stanford.edu Thu Oct 27 17:27:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:27:27 -0700 Subject: Problem svgdev2 SNF 2011-10-27 13:49:02: wafer loads on chuck, then nothing happens Message-ID: Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally. From gsosa at snf.stanford.edu Thu Oct 27 17:27:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:27:32 -0700 Subject: Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove Message-ID: Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally. From gsosa at snf.stanford.edu Thu Oct 27 17:27:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:27:38 -0700 Subject: Problem svgdev2 SNF 2011-10-27 14:33:54: a test wafer is in the chuck, doesn't move Message-ID: Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally.