Problem svgdev2 SNF 2011-10-27 13:49:02: wafer loads on chuck, then nothing happens

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Oct 27 13:49:03 PDT 2011


after developing 6 wafers without a problem, the 7th wafer loads on chuck, the chuck goes down but the developer dispense does not happen.  the cannisters all feel quite full of developer. Tried wiping the chuck with a damp wipe, to see if there might have been something obstructing the vacuum, test wafer ran ok, then the next wafer ran ok, but the one after that got stuck again.




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