Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove
qran at snf.stanford.edu
qran at snf.stanford.edu
Thu Oct 27 14:44:21 PDT 2011
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Problem svgdev2 SNF 2011-10-27 14:33:54: a test wafer is in the chuck, doesn't move
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Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove
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