Problem svgdev2 SNF 2011-10-27 13:49:02: wafer loads on chuck, then nothing happens

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 27 17:27:27 PDT 2011


Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally.




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