Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 27 17:27:32 PDT 2011


Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally.




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