Shutdown svgdev2 SNF 2011-10-27 14:44:21: a wafer is in the chuck, and can't remove

gsosa at gsosa at
Thu Oct 27 17:27:32 PDT 2011

Checked and replaced the solinoid for the developer shroud up/down function. Tuned up the pneumatics. Cycled many wafers through. All working normally.

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